During fabrication regarding semiconductor devices through silicon wafers, several processes tend to be performed previous to chopping your wafer towards individual motherboards to get packaging. At specific portions throughout fabrication with some semiconductor devices, soaked fabrication processes widely-used for example soaked etches. The substances utilized for the duration of all these wet systems such as acids or alkalies live in quartz tanks that are proof to help rust and also higher heat. Quartz tanks are also utilized as portion of your process with regard to clean-up silicon wafers, or perhaps within a chemical substance submitter program of a semiconductor generation line.
A quartz tank generally contains a quartz outlet/inlet tube that is definitely with transmission that has a synthetic resin tube employed to share chemical compounds into as well as from the quartz tank. Quartz conduits usually are applied for giving away substances considering that like conduits have higher chemical level of resistance properties, difficulty tightness, temperature resistance, as well as like. Various fixtures or perhaps pipe joint capsules are actually utilized to connect quartz plumbing with man made resin tubes.
For example, U.S. Pat. No. 5,516,159 to be able to Hirakawa et al. reveals a quartz water line mutual which include a bowl system having a pipe receiving percentage towards which a quartz tube might be inserted, some sort of ring-like closing fellow member kept at the water line receiving section from the combined body, plus a deformable freeze ring. A fanatic being externally fitted on to the actual quartz pipe in addition to attached to that synovial physique is usually provided, and then a annoying piece disposed inside the nut.
A trouble with traditional quartz tube fittings is the fact they are difficult that will shape in the course of workout servicing procedures, the two through assembly in addition to disassembly associated with your fittings. Conventional quartz tube fittings are usually in particular tough to assemble in addition to disassemble with cramped areas, this sort of as areas underneath quartz tanks the location where the quartz pipe fittings are located plus that happen to be tricky to get protection personnel in order to access. These parts normally possess a popular acid solution environment, putting towards issues which often repair people have in doing protection treatments along with traditional fixtures in place. The post with normal fixtures can be pretty fine, so that it is tricky to produce joints in between the actual quartz tube of the fish tank and various tubing. In addition, regular quartz pipe fittings typically leak and appear apart, introducing into the period had to perform repair and protection procedures.
While there are a number of quick-connect variety fittings available, for instance quick-connect pneumatic fittings and some sorts of drinking water fittings, none of them of the will be adapted for practical application to a new quartz gas tank along with none of them could be located between current fixtures inside a piping system devoid of changes of this sort of fittings throughout many way.
The current technology is definitely moved into a ramp-lock quick-connect installation gadget offering fluid conversation concerning tubular members just like a tube and also a flexible tube. The quick-connect fitting belonging to the creation will be modified to get located somewhere between typical type fittings with piping devices typically found in business for instance quartz pipes as well as synthetic resin tubes made use of with chemical refinement systems for semiconductor device fabrication. The device on the invention presents a rapid connect/disconnect coupling for regular fittings that happen to be or else challenging in order to build and disassemble. The apparatus from the technology therefore converts the text of an regular fitting into a easy connect/disconnect coupling.
In one particular embodiment with the invention, that quick-connect fitting has a very first coupling fellow member having a tube acquiring portion designed for you to receive a new typical appropriate on the pipe, and a ramp assistance sections using a pair of alternative spiral ramps produced therearound. The quick-connect fitted furthermore includes a following coupling associate which sealingly engages the best coupling member. An proxy portion on the second coupling member is adapted in order to be given a typical fitting for a tube. A locking training collar will be movably involved with all the second coupling new member along with features a pair of lock users disposed on an insides area on the collar. The lock associates slidably employ using that get out of hand ramps should the back of the shirt is actually aimed round the slam support section of the first coupling member. The lock members can be a set of two buttons that give you a ramp-to-button coupling process within the quick-connect fitting. In yet another embodiment, some associated with interior spin out of control ramps is often created for the interior surface in the back of the shirt which usually supplies a ramp-to-ramp coupling mechanism.
When that quick-connect fitting gadget on the innovation must be used within piping methods to get taking good chemicals, it really is more effective that will make your parts from the fitted system by using components which might be chemically proof in order to strong acid, good alkali, or even the particular like. Suitable elements getting compound weight which can be employed to help fabricate the features connected with your connecting machine contain synthetic resins just like fluorocarbon or perhaps fluoropolymer materials. For example, the initial and following coupling people explained above, which can become subjected to be able to corrosive substances while in use, might be produced from chemically resistant fluorocarbon materials.
Other embodiments on the quick-connect connecting of the technology comprise same parts as referred to above, with the addition regarding other parts to produce your quick-connect fitted appropriate for certain traditional fittings. In one alternate embodiment, a new tube member is usually disposed inside the pipe obtaining section of the initial coupling member, with all the pipe member able to extending into a pipe which has a normal fitting. In an additional choice embodiment, the particular pipe receiving component to the 1st coupling representative features a collar new member disposed inside a threaded cavity part that is certainly suitable for some other conventional pipe fitting.
The quick-connect fitting unit from the creation possesses this benefit of being able to become located involving current normal fittings utilized in plumbing contractor apparatus, eradicating the need to get adapting or retrofitting the standard fittings so that you can mount the quick-connect installation on the invention. In addition, the particular quick-connect fitted permits simpler preservation of piping systems, considering that absolutely no tools usually are was required to connect along with disconnect your quick-connect installation of the invention.
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